✦ LIBER ✦
Surface-sensitive multiple internal reflection spectroscopy as a tool to study surface mechanisms in CVD: the example of UV photodeposition of silicon dioxide and silicon nitride
✍ Scribed by C. Licoppe; C. Debauche
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 225 KB
- Volume
- 63
- Category
- Article
- ISSN
- 0169-4332
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