Surface roughness measurement of semi-conductor wafers using a modified total integrated scattering model

✍ Scribed by C.J. Tay; S.H. Wang; C. Quan; C.K. Ng

• Book ID: 119768330
• Publisher: Elsevier Science
• Year: 2002
• Tongue: English
• Weight: 112 KB
• Volume: 113
• Category: Article
• ISSN: 0030-4026
• DOI: 10.1078/0030-4026-00169