Surface roughening and erosion rate change at low energy SIMS depth profiling of silicon during oblique bombardment

✍ Scribed by B. Fares; B. Gautier; Ph. Holliger; N. Baboux; G. Prudon; J.-Cl. Dupuy

• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 679 KB
• Volume: 253
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2006.05.034