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Surface relaxation during plasma chemical vapor deposition of diamond-like carbon films, investigated by in-situ ellipsometry

✍ Scribed by A von Keudell; T Schwarz-Selinger; W Jacob

Book ID
114086197
Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
146 KB
Volume
308-309
Category
Article
ISSN
0040-6090

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