Surface recession of silicon under normally incident oxygen bombardment studied by atomic force microscopy of microscale sputtered craters

✍ Scribed by K. Wittmaack; M. Strigl; A. Horwarth

• Publisher: John Wiley and Sons
• Year: 2000
• Tongue: English
• Weight: 655 KB
• Volume: 29
• Category: Article
• ISSN: 0142-2421
• DOI: 10.1002/1096-9918(200010)29:10<717::aid-sia912>3.0.co;2-l