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Surface reactions in very low temperature (<150°C) hydrogenated amorphous silicon deposition, and applications to thin film transistors

✍ Scribed by Gregory N Parsons

Book ID: 117150246
Publisher: Elsevier Science
Year: 2000
Tongue: English
Weight: 372 KB
Volume: 266-269
Category: Article
ISSN: 0022-3093
DOI: 10.1016/s0022-3093(99)00713-9

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