Surface reactions and kinetically-driven patterning scheme for selective deposition of Si and Ge nanoparticle arrays on HfO2

✍ Scribed by Scott K. Stanley; Sachin V. Joshi; Sanjay K. Banerjee; John G. Ekerdt

• Book ID: 108279247
• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 235 KB
• Volume: 600
• Category: Article
• ISSN: 0039-6028
• DOI: 10.1016/j.susc.2005.12.029