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Surface reaction of CH3SiH3 on Ge(100) and Si(100)

✍ Scribed by Toshinori Takatsuka; Masaki Fujiu; Masao Sakuraba; Takashi Matsuura; Junichi Murota

Book ID: 108416194
Publisher: Elsevier Science
Year: 2000
Tongue: English
Weight: 279 KB
Volume: 162-163
Category: Article
ISSN: 0169-4332
DOI: 10.1016/s0169-4332(00)00185-9

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