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Surface reaction between water cluster ion and silicon substrate

✍ Scribed by Ryuto, H.; Ichihashi, G.; Takeuchi, M.; Takaoka, G.H.

Book ID: 122549217
Publisher: Elsevier Science
Year: 2013
Tongue: English
Weight: 448 KB
Volume: 315
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2013.05.083

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