✦ LIBER ✦
Surface profiling of insulating layers using desorption induced by monatomic or cluster ions of beam diameter in the 5–10 μm range
✍ Scribed by J.P. Thomas; A. Oladipo; M. Fallavier
- Book ID
- 113279500
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 346 KB
- Volume
- 42
- Category
- Article
- ISSN
- 0168-583X
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