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Surface processes on Si(1 1 1)7×7 and SiO2 mediated by low-energy ion irradiation in CF4

✍ Scribed by Zhenhua He; K.T Leung

Book ID: 108417432
Publisher: Elsevier Science
Year: 2001
Tongue: English
Weight: 136 KB
Volume: 174
Category: Article
ISSN: 0169-4332
DOI: 10.1016/s0169-4332(01)00175-1

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