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Surface Preparation of Aluminum Nitride for Metallization

✍ Scribed by Campman, R.; Mandich, D.; Meier, A.; Fagan, R.

Book ID: 111986766
Publisher: Taylor and Francis Group
Year: 2003
Tongue: English
Weight: 641 KB
Volume: 18
Category: Article
ISSN: 1042-6914
DOI: 10.1081/amp-120025076

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