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Surface plasmon enhanced blue–green photoluminescence from carbon-rich amorphous silicon carbide films

✍ Scribed by Zhe Li; Juncao Bian; Haiyan He; Zhaohui Ren; Xiwen Zhang; Xiang Li; Gaorong Han


Book ID
116608948
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
617 KB
Volume
513
Category
Article
ISSN
0925-8388

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## Abstract The carbon‐rich hydrogenated amorphous silicon carbide (a‐Si~1−__x__~C~__x__~:H) films were deposited by plasma enhanced chemical vapor deposition using silane (diluted to 10% in hydrogen) and ethylene as the gas sources. To observe surface enhanced Raman scattering (SERS), some samples