✦ LIBER ✦
Surface Planarization of GaN-on-Sapphire Template by Chemical Mechanical Polishing for Subsequent GaN Homoepitaxy
✍ Scribed by Aida, H.; Kim, S.-w.; Suzuki, T.; Koyama, K.; Aota, N.; Doi, T.; Yamazaki, T.
- Book ID
- 125493504
- Publisher
- The Electrochemical Society
- Year
- 2014
- Tongue
- English
- Weight
- 785 KB
- Volume
- 3
- Category
- Article
- ISSN
- 2162-8769
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