✦ LIBER ✦
Surface patterning of GaAs by CCl2F2 reactive ion etching : K. P. Hilton and J. Woodward. Vacuum 38, 519 (1988)
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 74 KB
- Volume
- 29
- Category
- Article
- ISSN
- 0026-2714
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