Surface passivation of silicon with the Plasmodul®

✍ Scribed by A. Schulz; K.-M. Baumgärtner; J. Feichtinger; M. Walker; U. Schumacher; A. Eike; K. Herz; F. Kessler

• Book ID: 108422897
• Publisher: Elsevier Science
• Year: 2001
• Tongue: English
• Weight: 399 KB
• Volume: 142-144
• Category: Article
• ISSN: 0257-8972
• DOI: 10.1016/s0257-8972(01)01180-x