✦ LIBER ✦
Surface passivation of In0.83Ga0.17As photodiode with high-quality SiN layer fabricated by ICPCVD at the lower temperature
✍ Scribed by Wei, Peng; Li, Xue; Li, Tao; Tang, Hengjing; Deng, Honghai; Shi, Ming; Gong, Haimei
- Book ID
- 122203889
- Publisher
- Elsevier Science
- Year
- 2014
- Tongue
- English
- Weight
- 541 KB
- Volume
- 62
- Category
- Article
- ISSN
- 1350-4495
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