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Surface Passivation of AlGaN/GaN HFETs Using AlN Layer Deposited by Reactive Magnetron Sputtering

✍ Scribed by Y. Liu; J.A. Bardwell; S.P. McAlister; S. Rolfe; H. Tang; J.B. Webb


Publisher
John Wiley and Sons
Year
2003
Tongue
English
Weight
129 KB
Volume
0
Category
Article
ISSN
1862-6351

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