Surface oxidation effects on the optical properties of silicon nanocrystals
β Scribed by Vasiliev, Igor; Chelikowsky, James R.; Martin, Richard M.
- Book ID
- 118044006
- Publisher
- The American Physical Society
- Year
- 2002
- Tongue
- English
- Weight
- 244 KB
- Volume
- 65
- Category
- Article
- ISSN
- 1098-0121
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Silicon nanocrystal superlattices consisting of alternating layers of silicon-rich oxide (SRO) and silica (SiO 2 ) were grown by electron beam evaporation, followed by thermal processing. All of the SRO depositions and the processing steps were done under conditions that were as similar as possible
Silicon, the leading material in microelectronics during the last four decades, also promises to be the key material in the future. Despite many claims that silicon technology has reached fundamental limits, the performance of silicon microelectronics continues to improve steadily. The same holds fo