Shot-to-shot variation in the characteristics of laser produced plasma plume and surface profile of N-type silicon (1 1 1) are investigated. In order to produce plasma, a Q-switched Nd: YAG laser (1064 nm, 10 mJ, 9-14 ns) is tightly focused on silicon target in air at room temperature. Target was ex
β¦ LIBER β¦
Surface morphology and structure modification of silicon layers induced by nanosecond laser radiation
β Scribed by A.V. Demchuk; V.A. Labunov
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 749 KB
- Volume
- 86
- Category
- Article
- ISSN
- 0169-4332
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