Surface morphology and removal rates for dry- and wet-etched novel resonator materials: Part I: La3Ga5.5Ta0.5O14

✍ Scribed by D.C Hays; P Leerungnawarat; S.J Pearton; G Archibald; R.C Smythe

• Book ID: 108416233
• Publisher: Elsevier Science
• Year: 2000
• Tongue: English
• Weight: 570 KB
• Volume: 165
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/s0169-4332(00)00367-6