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Surface modifications in diamond-like carbon films submitted to low-energy nitrogen ion bombardment

✍ Scribed by S.I Castañeda; V.A.A Espinoza; F.L Freire Jr.; D.F Franceschini; L.G Jacobsohn

Book ID
114164493
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
162 KB
Volume
175-177
Category
Article
ISSN
0168-583X

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Diamond and DLC thin films deposited using hot-filament chemical vapour deposition technique at various parameters were irradiated with 50 MeV ST' ions. The resulting microstructural changes were studied using X-ray diffraction and scanning electron microscopy. All the samples showed the development