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Surface modification of tetrafluoroethylene–perfluoroalkyl vinylether copolymer (PFA) by plasmas for copper metallization

✍ Scribed by N. Inagaki; K. Narushima; T. Yamamoto

Publisher
John Wiley and Sons
Year
2002
Tongue
English
Weight
171 KB
Volume
85
Category
Article
ISSN
0021-8995

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