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Surface modification of silicon by laser surface treatment: Improvement of adhesion and copper deposition

✍ Scribed by Cheon Lee; Dong-Yong Kim; Jae-Hong Kim; Kyoung-Cheol Lee; Chang-Su Hui


Publisher
Springer US
Year
2005
Tongue
English
Weight
591 KB
Volume
34
Category
Article
ISSN
0361-5235

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