Surface microtopography measurement of a standard flat surface by multiple-beam interference fringes at reflection

✍ Scribed by D.G. Abdelsalam; M.S. Shaalan; M.M. Eloker

• Publisher: Elsevier Science
• Year: 2010
• Tongue: English
• Weight: 603 KB
• Volume: 48
• Category: Article
• ISSN: 0143-8166
• DOI: 10.1016/j.optlaseng.2009.12.015