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Surface-micromachined mirrors for laser-beam positioning

✍ Scribed by N.C. Tien; O. Solgaard; M-H. Kiang; M. Daneman; K.Y. Lau; R.S. Muller

Book ID
108028399
Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
512 KB
Volume
52
Category
Article
ISSN
0924-4247

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A new method for infrared laser beam diagnostics was developed based on the interferometrical measurement of the deflection mirror deformation. It is shown that with this method the basic beam data as beam diameter, position, intensity and within limits also intensity distribution can be determined