✦ LIBER ✦
Surface-micromachined epitaxial silicon cantilevers as movable optical waveguides on silicon-on-insulator substrates
✍ Scribed by Terry T.H. Eng; Sidney C. Kan; George K.L. Wong
- Book ID
- 103959817
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 546 KB
- Volume
- 49
- Category
- Article
- ISSN
- 0924-4247
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