Surface microanalysis by reflection electron energy-loss spectroscopy

✍ Scribed by Wang, Z. L.

• Publisher: Wiley (John Wiley & Sons)
• Year: 1990
• Tongue: English
• Weight: 668 KB
• Volume: 14
• Category: Article
• ISSN: 0741-0581
• DOI: 10.1002/jemt.1060140104

✦ Synopsis

Several basic physical concepts of applying eq. Ik = 1oN"t to surface microanalysis by reflection electron energy-loss spectroscopy (REELS) are clarified. Here Ik and I are the integrated intensities of the core ionization edge and the low loss part, u is the scattering cross section of element x with atomic concentration N", and t is the specimen thickness. The reflected inelastic electrons are found to be distributed almost symmetrically around the Bragg spots and can be reasonably described by a Lorentzian function. EELS microanalysis can be performed by using the diffracted spots. The w correction, arising from the angular contributions of the neighbouring spots into the spectrometer collecting aperture, is required to be considered.