✦ LIBER ✦

Surface metal contamination on silicon wafers after hydrogen plasma immersion ion implantation

✍ Scribed by Zhineng Fan; Xuchu Zeng; Paul K Chu; Chung Chan; Masaharu Watanabe

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

An evaluation of contamination from plas

✍ Shu Qin; Chung Chan 📂 Article 📅 1994 🏛 Springer US 🌐 English ⚖ 397 KB

Oxygen and hydrogen profiles in metal su

✍ P.B Johnson; P.W Gilberd; A Markwitz; W.J Trompetter; G.A Collins; K.T Short; D. 📂 Article 📅 2001 🏛 Elsevier Science 🌐 English ⚖ 525 KB

Pack-extraction method combined with ind

✍ Shimizu, Hirofumi; Ishiwari, Shuichi 📂 Article 📅 2000 🏛 Institute of Physics 🌐 English ⚖ 143 KB