✦ LIBER ✦
Surface mass spectrometric analysis of SiCl4/SiF4/O2 dry etch gate recessed 120 nm T-gate GaAs pHEMTs
✍ Scribed by X. Li; K. Elgaid; H. McLelland; I.G. Thayne
- Book ID
- 108207401
- Publisher
- Elsevier Science
- Year
- 2005
- Tongue
- English
- Weight
- 537 KB
- Volume
- 78-79
- Category
- Article
- ISSN
- 0167-9317
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