✦ LIBER ✦
Surface-layer swelling on implantation of hydrogen ions into silicon at different doping concentrations
✍ Scribed by Abroyan, I. A. ;Kruglov, M. V. ;Solomin, I. K.
- Book ID
- 105379889
- Publisher
- John Wiley and Sons
- Year
- 1987
- Tongue
- English
- Weight
- 197 KB
- Volume
- 101
- Category
- Article
- ISSN
- 0031-8965
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