✦ LIBER ✦
Surface kinetics and subplantation phenomena affecting the texture, morphology, stress, and growth evolution of titanium nitride films
✍ Scribed by Patsalas, P.; Gravalidis, C.; Logothetidis, S.
- Book ID
- 120217546
- Publisher
- American Institute of Physics
- Year
- 2004
- Tongue
- English
- Weight
- 479 KB
- Volume
- 96
- Category
- Article
- ISSN
- 0021-8979
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