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Surface electrode configurations for quartz MEMS double-ended tuning fork resonator

✍ Scribed by Chai, Yanli; Meng, Guangchan; Chen, Xueying; Liang, Jinxing

Book ID: 120972645
Publisher: The Institution of Engineering and Technology
Year: 2013
Tongue: English
Weight: 423 KB
Volume: 8
Category: Article
ISSN: 1750-0443
DOI: 10.1049/mnl.2012.0621

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