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Surface disruption as an observable factor in the energy distribution of sputtered particles

✍ Scribed by H.E. Roosendaal; R.A. Haring; J.B. Sanders

Publisher: Elsevier Science
Year: 1982
Weight: 171 KB
Volume: 194
Category: Article
ISSN: 0167-5087
DOI: 10.1016/0029-554x(82)90584-5

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