Surface desorption of gases from photoresist : V. Vinikman, A. Samuel and D. Schneider. Vacuum 24, 77 (1974)

• Publisher: Elsevier Science
• Year: 1974
• Tongue: English
• Weight: 117 KB
• Volume: 13
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(74)90051-1