Surface damages in diamond by Ar/O[sub 2] plasma and their effect on the electrical and electrochemical characteristics of boron-doped layers

✍ Scribed by Denisenko, A.; Romanyuk, A.; Pietzka, C.; Scharpf, J.; Kohn, E.

• Book ID: 120287972
• Publisher: American Institute of Physics
• Year: 2010
• Tongue: English
• Weight: 521 KB
• Volume: 108
• Category: Article
• ISSN: 0021-8979
• DOI: 10.1063/1.3489986