✦ LIBER ✦
Surface cleaning and preparation in AlGaN/GaN-based HEMT processing as assessed by X-ray photoelectron spectroscopy
✍ Scribed by Fernando González-Posada; Jennifer A. Bardwell; Simona Moisa; Soufien Haffouz; Haipeng Tang; Alejandro F. Braña; Elías Muñoz
- Publisher
- Elsevier Science
- Year
- 2007
- Tongue
- English
- Weight
- 232 KB
- Volume
- 253
- Category
- Article
- ISSN
- 0169-4332
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