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Surface Chemical Bonding States and Ferroelectricity of Pb(Zr0.52Ti0.48)O3 Thin Films

✍ Scribed by C.R. Cho


Publisher
John Wiley and Sons
Year
2000
Tongue
English
Weight
160 KB
Volume
35
Category
Article
ISSN
0232-1300

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## Abstract The integration and the device realization of Pb(Zr, Ti)O~3~ (PZT) thick films on Si substrates are known to be extremely difficult because the processing temperature of the PZT thick film is close to the melting point of Si. However, PZT thick‐film devices on Si warrant attention as th