Surface characterization study of InP(100) substrates using ion-scattering spectroscopy, Auger electron spectroscopy and electron spectroscopy for chemical analysis I: Comparison of substrate-cleaning techniques

✍ Scribed by Stuart J. Hoekje; Gar B. Hoflund

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 859 KB
• Volume: 197
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(91)90247-u