Surface oxidation of silicon carbide pla
β
Pu Sen Wang; Subhas G. Malghan; Stephen M. Hsu; T. N. Wittberg
π
Article
π
1992
π
John Wiley and Sons
π
English
β 364 KB
## Abstract Xβray photoelectron spectroscopy (XPS) and Bremsstrahlungβexcited Auger electron spectroscopy (XAES) were used to study the surface composition and oxidation of silicon carbide platelets which had been heated in air at 500β800Β° C. The surface oxide thickness for each heating time and te