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Surface Characterization of a Silicon-Chip-Based DNA Microarray

✍ Scribed by Lenigk, Ralf; Carles, Maria; Ip, Nancy Y.; Sucher, Nikolaus J.


Book ID
111876119
Publisher
American Chemical Society
Year
2001
Tongue
English
Weight
152 KB
Volume
17
Category
Article
ISSN
0743-7463

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A three-dimensional waveguide substrate
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## Abstract In this paper we present a three‐dimensional waveguide structure with unique optical and fluidic properties and demonstrate its application as a substrate for DNA microarrays. The structure is fabricated by thermal oxidation of a macroporous silicon membrane with a periodic pattern of d