✦ LIBER ✦
Surface characteristics of etched parylene-C films for low-damaged patterning process using inductively-coupled O2/CHF3 gas plasma
✍ Scribed by Ham, Yong-Hyun; Shutov, Dmitriy Alexandrovich; Kwon, Kwang-Ho
- Book ID
- 123295672
- Publisher
- Elsevier Science
- Year
- 2013
- Tongue
- English
- Weight
- 671 KB
- Volume
- 273
- Category
- Article
- ISSN
- 0169-4332
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