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Surface and polarization studies of the passive films formed by ion beam mixing

✍ Scribed by Ma Zongfu; Weng Jie


Book ID
103615316
Publisher
Elsevier Science
Year
1989
Tongue
English
Weight
573 KB
Volume
37
Category
Article
ISSN
0169-4332

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Fundamental study of TiN films deposited
✍ K. Hayashi; K. Sugiyama; K. Fukutani; H. Kittaka πŸ“‚ Article πŸ“… 1989 πŸ› Elsevier Science 🌐 English βš– 393 KB

A study was performed to investigate the influence of process parameters on the properties of TiN films deposited by ion beam mixing. Relatively dense and homogeneous structures or dense columnar structures were observed by scanning electron microscopy. From the results of X-ray diffraction and X-ra