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Surface and interface analysis of PVD Al-O-N and γ-Al2O3 diffusion barriers

✍ Scribed by R. Cremer; M. Witthaut; K. Reichert; D. Neuschütz

Publisher
Springer
Year
1999
Tongue
English
Weight
625 KB
Volume
365
Category
Article
ISSN
1618-2650

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