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Surface and interface analysis by nonresonant multiphoton ionization of sputtered neutrals

✍ Scribed by Joan B. Pallix; Keith T. Gillen; Christopher H. Becker


Book ID
113279469
Publisher
Elsevier Science
Year
1988
Tongue
English
Weight
690 KB
Volume
33
Category
Article
ISSN
0168-583X

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We have developed a surface analysis system that allows us to analyse the elemental composition of a sample with three-dimensional spatial resolution. The neutral material sputtered from a sample surface by Ga Y ion impact is post-ionized by non-resonant multiphoton ionization with an ArF excimer la