✦ LIBER ✦
Surface and bulk electrical conduction in low-deposition-temperature Si3N4 and Al2O3 films for silicon devices : Robert B. Comizzoli. RCA Review 37, 473 (December 1976)
- Publisher
- Elsevier Science
- Year
- 1977
- Tongue
- English
- Weight
- 123 KB
- Volume
- 16
- Category
- Article
- ISSN
- 0026-2714
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