Surface acoustic wave properties of (100) AIN films on diamond with different IDT positions

✍ Scribed by Zhi-xun Lin; Sean Wu; Ruyen Ro; Maw-shung Lee

• Book ID: 118259089
• Publisher: IEEE
• Year: 2009
• Tongue: English
• Weight: 710 KB
• Volume: 56
• Category: Article
• ISSN: 0885-3010
• DOI: 10.1109/tuffc.2009.1166