Surface acoustic wave microsensors
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Showko Shiokawa; Jun Kondoh
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Article
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1996
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John Wiley and Sons
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English
โ 567 KB
It was found that a surface acoustic wave microsensor is highly sensitive in detecting the physical and chemical changes of the medium on the vibrating surface in real time. Hence, microsensors are used in many applications. There are already several types of surface acoustic wave microsensors with