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Suppression of the boron penetration induced dielectric degradation by using a stacked-amorphous-silicon film as the gate structure for pMOSFET

✍ Scribed by Shye Lin Wu; Chung Len Lee; Tan Fu Lei


Book ID
114536407
Publisher
IEEE
Year
1996
Tongue
English
Weight
849 KB
Volume
43
Category
Article
ISSN
0018-9383

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