✦ LIBER ✦
Suppression of stress-induced leakage current after Fowler-Nordheim stressing by deuterium pyrogenic oxidation and deuterated poly-Si deposition
✍ Scribed by Mitani, Y.; Satake, H.; Itoh, H.; Toriumi, A.
- Book ID
- 114616769
- Publisher
- IEEE
- Year
- 2002
- Tongue
- English
- Weight
- 247 KB
- Volume
- 49
- Category
- Article
- ISSN
- 0018-9383
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